Calibration Procedures and Guidelines for Select Equipment Used in Testing Cleanrooms and Other Controlled Environments

Published by: Institute of Environmental Sciences and Technology / 2012 / 40 pages
This Recommended Practice (RP) covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided

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